• DocumentCode
    649518
  • Title

    Investigation of high gigahertz acoustic phonon lifetimes in thin silicon membranes

  • Author

    Schubert, Martin ; Grossmann, M. ; Klingele, Matthias ; Ristow, O. ; Hettich, M. ; Dekorsy, T.

  • Author_Institution
    Dept. of Phys., Univ. Konstanz, Konstanz, Germany
  • fYear
    2013
  • fDate
    25-27 Sept. 2013
  • Firstpage
    13
  • Lastpage
    14
  • Abstract
    Acoustic properties of materials in the high gigahertz range are still barely understood, even for well characterized materials like silicon. Acoustic phonons play an important role in dephasing processes as well as in thermal transport in general. Silicon thin films are widely used in the semiconductor microelectronics industry. By measuring the phonon lifetimes in silicon membranes, we hope to further the understanding of thermal transport processes in these systems.
  • Keywords
    acoustic wave effects; elemental semiconductors; membranes; phonons; semiconductor thin films; silicon; Si; acoustic properties; dephasing processes; high gigahertz acoustic phonon lifetimes; semiconductor microelectronics industry; silicon thin films; thermal transport; thin silicon membranes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal Investigations of ICs and Systems (THERMINIC), 2013 19th International Workshop on
  • Conference_Location
    Berlin
  • Print_ISBN
    978-1-4799-2271-0
  • Type

    conf

  • DOI
    10.1109/THERMINIC.2013.6675211
  • Filename
    6675211