DocumentCode
650115
Title
Improvement of the electrical contact between carbon nanotubes and metallic electrodes by laser irradiation
Author
Silveira, J.V. ; Savu, R. ; Canesqui, M.A. ; Mendes Filho, Joao ; Swart, J.W. ; Filho, A. G. Souza ; Moshkalev, S.A.
Author_Institution
Dept. de Fis., Univ. Fed. do Ceara, Fortaleza, Brazil
fYear
2013
fDate
2-6 Sept. 2013
Firstpage
1
Lastpage
4
Abstract
In this work we used a new approach for electrical contact improvement between multi-wall carbon nanotubes and metallic electrodes by localized laser heating. The nanotubes were suspended, using the dielectrophoresis technique, over a gap of 1μm width and 5μm depth connecting the ends of the patterned electrodes. Subsequently, the as deposited nanotubes were directly heated, in ambient atmosphere, by a laser having a wavelength of 473nm. The Raman signal of the nanotubes, through its G band displacement, was used to determine the process temperature and this parameter was controlled by calibrating the incident power density. The changes in the nanotubes morphology were evaluated using scanning electron microscopy, Raman spectroscopy and electrical measurements. After calibration, this method was employed for improving the electrical contact between suspended multi-wall carbon nanotubes and different electrodes (W, Ti and Au). The reduction in the electrical resistance was between 80 - 99%, 80 - 95% and 10 - 90% for W, Ti and Au electrodes, respectively, resulting in contact resistivity as low as ~1 kΩμm2.
Keywords
Raman spectroscopy; carbon nanotubes; electrical contacts; electrophoresis; gold; laser deposition; scanning electron microscopy; titanium; tungsten; Au; G band displacement; Raman signal; Raman spectroscopy; Ti; W; dielectrophoresis technique; electrical contact; electrical measurement; electrical resistance; laser irradiation; localized laser heating; metallic electrodes; multiwall carbon nanotubes; nanotube morphology; scanning electron microscopy; size 1 mum; size 5 mum; wavelength 473 nm; Carbon nanotubes; Raman spectroscopy; contact resistance; laser treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
Conference_Location
Curitiba
Print_ISBN
978-1-4799-0516-4
Type
conf
DOI
10.1109/SBMicro.2013.6676147
Filename
6676147
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