DocumentCode
650131
Title
Kinetic characteristics of the SAW humidity sensor partially coated with graphene oxide thin film
Author
Balashov, S.M. ; Balachova, O.V. ; Braga, A.V.U. ; Bazetto, M.C.Q. ; Pavani Filho, A. ; Moshkalev, S.
Author_Institution
Dept. of Microsyst., Center for Inf. Technol. Renato Archer (CTI), Campinas, Brazil
fYear
2013
fDate
2-6 Sept. 2013
Firstpage
1
Lastpage
4
Abstract
Atomization of one or two microliter droplets of aqueous dispersion of graphene oxide (GO) by the surface acoustic wave (SAW) atomizer was used to deposit GO sensitive films of 15-30-nm thickness onto the surface of the SAW humidity sensor. Sensitivity of the sensors with these films as sensitive elements was calibrated over a wide range of humidity using a special procedure of preparation of standards, and adsorption kinetic curves for this process were obtained. The first-order rate kinetic equation with special additional linear term was shown to be adequate for modeling the kinetics of water adsorption onto the GO thin film. All parameters of this equation were calculated from least-squares fitting of experimental data. It was shown that the sensor partially coated with the graphene oxide film has good sensitivity and very short response time. The developed approach of experimental data treatment can be used for calibration of various types of portable SAW sensors.
Keywords
humidity sensors; surface acoustic wave sensors; SAW humidity sensor; aqueous dispersion; atomization; first-order rate kinetic equation; kinetic characteristics; microliter droplets; partially coated graphene oxide thin film; surface acoustic wave atomizer; wavelength 15 nm to 30 nm; SAW atomizer; SAW sensor; graphene oxide film; humidity sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
Conference_Location
Curitiba
Print_ISBN
978-1-4799-0516-4
Type
conf
DOI
10.1109/SBMicro.2013.6676163
Filename
6676163
Link To Document