• DocumentCode
    650131
  • Title

    Kinetic characteristics of the SAW humidity sensor partially coated with graphene oxide thin film

  • Author

    Balashov, S.M. ; Balachova, O.V. ; Braga, A.V.U. ; Bazetto, M.C.Q. ; Pavani Filho, A. ; Moshkalev, S.

  • Author_Institution
    Dept. of Microsyst., Center for Inf. Technol. Renato Archer (CTI), Campinas, Brazil
  • fYear
    2013
  • fDate
    2-6 Sept. 2013
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Atomization of one or two microliter droplets of aqueous dispersion of graphene oxide (GO) by the surface acoustic wave (SAW) atomizer was used to deposit GO sensitive films of 15-30-nm thickness onto the surface of the SAW humidity sensor. Sensitivity of the sensors with these films as sensitive elements was calibrated over a wide range of humidity using a special procedure of preparation of standards, and adsorption kinetic curves for this process were obtained. The first-order rate kinetic equation with special additional linear term was shown to be adequate for modeling the kinetics of water adsorption onto the GO thin film. All parameters of this equation were calculated from least-squares fitting of experimental data. It was shown that the sensor partially coated with the graphene oxide film has good sensitivity and very short response time. The developed approach of experimental data treatment can be used for calibration of various types of portable SAW sensors.
  • Keywords
    humidity sensors; surface acoustic wave sensors; SAW humidity sensor; aqueous dispersion; atomization; first-order rate kinetic equation; kinetic characteristics; microliter droplets; partially coated graphene oxide thin film; surface acoustic wave atomizer; wavelength 15 nm to 30 nm; SAW atomizer; SAW sensor; graphene oxide film; humidity sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
  • Conference_Location
    Curitiba
  • Print_ISBN
    978-1-4799-0516-4
  • Type

    conf

  • DOI
    10.1109/SBMicro.2013.6676163
  • Filename
    6676163