Distributed MEMS phase shifter for millimeter-wave applications

There is a demand of millimeter waves (mmW) high data-rate communication systems. Systems should have small area as well as low power consumption and low cost in order to address wireless consumer applications. In this paper a low-loss distributed microelectromechanical (MEMS) Phase Shifter for mmW applications based on an innovative concept of distributed MEMS and slow-wave coplanar transmission lines (S-CPW) is proposed. The phase shift is achieved by releasing the ribbons of the shielding layer of the S-CPW with a HF vapor etching process that allows the motion when a DC voltage is applied, changing the phase of the propagating signal. An electromechanical model was carried out for the distributed MEMS. It is composed of lumped elements that allow simulating the electromechanical behavior of the distributed MEMS and the phase shift. The fabrication process is described in detail. Initial simulation results show potentially high electrical performance.