Modeling parameter estimation and vibration control of the solar cell substrate handling robot

There are many automation system in the thin film solar cell manufacturing line. Especially, many kinds of robot are used to handle the large solar cell substrate. Handling the large substrate at high speed is an important issue for high productivity. Because the robot handles the large and heavy substrate at high speed, there are some issues such as vibration control and the optimal design of arms and forks. There have been some previous research about the deflection and the compensation of arms and forks. And we also performed the static/dynamic simulation and analyzed the vibration characteristics in the previous research. In the paper, we carried out more specific simulation and compared the result with the basic vibration characteristics. We can establish the exacter simulation model by the comparison between the simulation and the experiment. We applied the vibration control algorithm such as input shaping algorithm to reduce vibration and proved the effect of the vibration control using both simulation and experiment.