Title :
Bio-mimetic gyroscopic sensor for vestibular prostheses
Author :
Andreou, Charalambos M. ; Pahitas, Yiannis ; Pilavaki, Evdokia ; Georgiou, Julius
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Cyprus, Nicosia, Cyprus
fDate :
Oct. 31 2013-Nov. 2 2013
Abstract :
A micro-fluidic gyroscope that mimics the natural vestibular semicircular canals (SCC) is presented. This gyro takes advantage of a hybrid MEMS process that combines micro-fluidic channels on micro-machined glass wafers with active components realized in silicon wafers. The proposed gyro offers significant advantages in terms of power consumption and reliability compared to prior art. The presented structures were fabricated using Infineon MultiMEMS process and the occupied area is 6mm2 including the pads area.
Keywords :
bioMEMS; biomedical materials; biomimetics; glass structure; gyroscopes; microfluidics; micromachining; power consumption; prosthetics; silicon; active component; biomimetic gyroscopic sensor; gyroscopic sensor power consumption; gyroscopic sensor reliability; hybrid MEMS process; infineon multiMEMS process; microfluidic channel; microfluidic gyroscope; micromachined glass wafer; natural vestibular semicircular canal; silicon wafer; size 6 mm; structure fabrication; vestibular prosthesis; Fluids; Glass; Hair; Irrigation; Micromechanical devices; Power demand; Sensitivity;
Conference_Titel :
Biomedical Circuits and Systems Conference (BioCAS), 2013 IEEE
Conference_Location :
Rotterdam
DOI :
10.1109/BioCAS.2013.6679629
