Bio-mimetic gyroscopic sensor for vestibular prostheses

Author

Andreou, Charalambos M. ; Pahitas, Yiannis ; Pilavaki, Evdokia ; Georgiou, Julius

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Cyprus, Nicosia, Cyprus

fYear

2013

fDate

Oct. 31 2013-Nov. 2 2013

Firstpage

17

Lastpage

20

Abstract

A micro-fluidic gyroscope that mimics the natural vestibular semicircular canals (SCC) is presented. This gyro takes advantage of a hybrid MEMS process that combines micro-fluidic channels on micro-machined glass wafers with active components realized in silicon wafers. The proposed gyro offers significant advantages in terms of power consumption and reliability compared to prior art. The presented structures were fabricated using Infineon MultiMEMS process and the occupied area is 6mm² including the pads area.

Keywords

bioMEMS; biomedical materials; biomimetics; glass structure; gyroscopes; microfluidics; micromachining; power consumption; prosthetics; silicon; active component; biomimetic gyroscopic sensor; gyroscopic sensor power consumption; gyroscopic sensor reliability; hybrid MEMS process; infineon multiMEMS process; microfluidic channel; microfluidic gyroscope; micromachined glass wafer; natural vestibular semicircular canal; silicon wafer; size 6 mm; structure fabrication; vestibular prosthesis; Fluids; Glass; Hair; Irrigation; Micromechanical devices; Power demand; Sensitivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Biomedical Circuits and Systems Conference (BioCAS), 2013 IEEE

Conference_Location

Rotterdam

Type

conf

DOI

10.1109/BioCAS.2013.6679629

Filename

6679629