Design Optimization of Electromagnetic MEMS Energy Harvester with Serpentine Coil

Author

Tanaka, Yuichi ; Fujita, Takashi ; Kotoge, Tatsuya ; Yamaguchi, Kazuhiro ; Sonoda, Ken´ichiro ; Kanda, K. ; Maenaka, Kazusuke

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of Hyogo, Himeji, Japan

fYear

2013

fDate

20-23 Aug. 2013

Firstpage

1656

Lastpage

1658

Abstract

This paper presents a design optimization of a novel electromagnetic MEMS energy harvester by using a fine patterned NdFeB array with a serpentine shaped coil for gathering electromotive force. The serpentine coil can be easy to be fabricated in comparison with a spiral coil that fabricated in the previous work. The magnetic flux density is calculated by FEM analysis. The various line-and-space parameters of the magnet and the coil are investigated for the optimization of the output power. The electromotive force and the output power are calculated by a theoretical equation. As a result of optimization, the electromotive force of 31.3 mV and the output power of 0.722 μW are obtained when an applied vibration amplitude is ±200 um at 595 Hz with magnet line and space of 70 μm.

Keywords

electromagnetic devices; energy harvesting; finite element analysis; iron compounds; magnetic flux; micromechanical devices; neodymium compounds; optimisation; FEM analysis; NdFeB; design optimization; electromagnetic MEMS energy harvester; electromotive force gathering; fine patterned NdFeB array; frequency 595 Hz; line-and-space parameters; magnetic flux density; power 0.722 muW; serpentine shaped coil; voltage 31.3 mV; Arrays; Coils; Electromagnetics; Force; Magnetic flux density; Power generation; MEMS; design optimization; electromagnetic; energy harvester; serpentine coil;

fLanguage

English

Publisher

ieee

Conference_Titel

Green Computing and Communications (GreenCom), 2013 IEEE and Internet of Things (iThings/CPSCom), IEEE International Conference on and IEEE Cyber, Physical and Social Computing

Conference_Location

Beijing

Type

conf

DOI

10.1109/GreenCom-iThings-CPSCom.2013.300

Filename

6682312