Title :
Polyaniline-Coated Surface Acoustic Wave Sensor for Humidity Detection
Author :
Xiao Xie ; Wen Wang ; Shitang He ; Ning Mu ; Yong Pan
Author_Institution :
Inst. of Acoust., Beijing, China
Abstract :
In this paper, a polyaniline (PANI)-coated Surface Acoustic Wave (SAW) sensor was developed for humidity detection. Based on the coupling-of-modes (COM) simulation, 150 MHz two-port SAW resonators with low insertion loss and high Q factor were designed and fabricated on the ST-X quartz substrate with Al strips. Dual-resonator oscillator was built for gas sensing, and it was composed of a reference SAW resonator and a PANI-coated one. Large sensor response and good repeatability were observed in the sensor experiment. The effect of the PANI thickness on sensor response was also investigated.
Keywords :
humidity sensors; surface acoustic wave sensors; Q factor; coupling-of-modes simulation; dual-resonator oscillator; frequency 150 MHz; humidity detection; insertion loss; polyaniline-coated surface acoustic wave sensor; Coatings; Humidity; Mathematical model; Oscillators; Resonant frequency; Surface acoustic waves; gas sensor; humidity; polyaniline; surface acoustic wave; two-port resonator;
Conference_Titel :
Green Computing and Communications (GreenCom), 2013 IEEE and Internet of Things (iThings/CPSCom), IEEE International Conference on and IEEE Cyber, Physical and Social Computing
Conference_Location :
Beijing
DOI :
10.1109/GreenCom-iThings-CPSCom.2013.308
