Title :
Theory of Lamb Wave Transducers and Their Applications for Gas and Liquid Sensing
Author_Institution :
Sch. of Electr. Eng. & Autom., Anhui Univ., Hefei, China
Abstract :
Theoretical basis of Lamb wave transducers (LWT) for gas and liquid sensing is developed systematically. Two basic types of transduction mechanisms, piezoelectric and electrostatic, are discussed. A model for capacitive LWTs with second-order bending mode excitation is further developed. A design with a 100 nm thick silicon plate shows GHz resonance frequency and zg mass resolution, which is comparable with nanomechanical resonators using cantilevers and doubly clamped beams.
Keywords :
bending; capacitors; elemental semiconductors; gas sensors; piezoelectric transducers; silicon; surface acoustic wave sensors; Si; cantilever; capacitive LWT; doubly clamped beam; electrostatic device; gas sensing; lamb wave transducer; liquid sensing; mass resolution; nanomechanical resonator; piezoelectric device; second-order bending mode excitation; size 100 nm; Acoustics; Liquids; Mathematical model; Resonant frequency; Sensors; Silicon; Transducers; Lamb wave transducer; gas sensing; mass resolution; model; theory;
Conference_Titel :
Green Computing and Communications (GreenCom), 2013 IEEE and Internet of Things (iThings/CPSCom), IEEE International Conference on and IEEE Cyber, Physical and Social Computing
Conference_Location :
Beijing
DOI :
10.1109/GreenCom-iThings-CPSCom.2013.315
