Title :
A simple nonlinear mBVD model parameter extraction method for intrinsically switchable ferroelectric FBARs
Author :
Seungku Lee ; Lee, Victor ; Sis, Seyit Ahmet ; Mortazawi, Amir
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
In this paper, a method for extracting the nonlinear mBVD model parameters for intrinsically switchable ferroelectric thin film bulk acoustic resonators (FBARs) is presented. Ferroelectric FBARs based on BST exhibit an electric field induced piezoelectric effect. This property allows for the design of ferroelectric FBAR based tunable and switchable circuits. Simple yet accurate nonlinear models are essential to accurately predict the nonlinear behavior of such devices. This paper provides the detailed parameter extraction method for BST FBARs. Simulation results for the extracted nonlinear mBVD model for a BST FBAR show very good agreement with measurement results over a wide range of dc bias voltages.
Keywords :
acoustic resonators; electric field effects; ferroelectric devices; electric field induced piezoelectric effect; film bulk acoustic resonators; nonlinear mBVD model; parameter extraction method; switchable circuits; switchable ferroelectric FBAR; Film bulk acoustic resonators; Frequency measurement; Impedance; Integrated circuit modeling; Parameter extraction; Resonant frequency; Voltage measurement; electrostriction; ferroelectric devices; nonlinear mBVD model; parameter extraction;
Conference_Titel :
Microwave Conference (EuMC), 2013 European
Conference_Location :
Nuremberg
