DocumentCode
656310
Title
An atmospheric pressure plasma power supply with digital constant power control
Author
Ming-Hsien Cheng ; Tsorng-Juu Liang
Author_Institution
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
fYear
2013
fDate
3-6 Nov. 2013
Firstpage
332
Lastpage
337
Abstract
In this paper, an atmospheric pressure plasma power supply with constant power control is analyzed and implemented. A series resonant network with step up transformer is designed to provide 3kW and 5 kVrms~7.5 kVrms for atmospheric pressure plasma power supply. The equivalent circuit model of the plasma reactor is derived and the operating principle of the series resonant inverter is discussed. Also, a digital signal processor is used to control the phase shift angle of the series resonant inverter and achieving constant power control with very simple algorithm. The operating frequency of the full bridge series resonant inverter is higher than the resonant frequency so that the zero voltage switching (ZVS) can be achieved and the efficiency can be increased. Finally, a power supply with 3 kW and 5 kVrms~7.5 kVrms is implemented in the laboratory. In addition, an auxiliary winding of step-up transformer is added so that the maximum voltage is limited and the under voltage condition operating can be avoided. The experimental results reveal that the plasma reactor can be controlled at the designated value and the maximum efficiency is 91.34% at 1.8 kW/6.34 kVrms.
Keywords
digital control; digital signal processing chips; equivalent circuits; power control; resonant invertors; transformers; zero voltage switching; ZVS; atmospheric pressure plasma power supply; auxiliary winding; bridge series resonant inverter; digital constant power control; digital signal processor; equivalent circuit model; phase shift angle control; plasma reactor; power 3 kW; resonant frequency; series resonant network; step up transformer; step-up transformer; zero voltage switching; Intellectual property; Inverters; Laboratories; Manganese; Power measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Future Energy Electronics Conference (IFEEC), 2013 1st International
Conference_Location
Tainan
Print_ISBN
978-1-4799-0071-8
Type
conf
DOI
10.1109/IFEEC.2013.6687526
Filename
6687526
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