Title :
An atmospheric pressure plasma power supply with digital constant power control
Author :
Ming-Hsien Cheng ; Tsorng-Juu Liang
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
In this paper, an atmospheric pressure plasma power supply with constant power control is analyzed and implemented. A series resonant network with step up transformer is designed to provide 3kW and 5 kVrms~7.5 kVrms for atmospheric pressure plasma power supply. The equivalent circuit model of the plasma reactor is derived and the operating principle of the series resonant inverter is discussed. Also, a digital signal processor is used to control the phase shift angle of the series resonant inverter and achieving constant power control with very simple algorithm. The operating frequency of the full bridge series resonant inverter is higher than the resonant frequency so that the zero voltage switching (ZVS) can be achieved and the efficiency can be increased. Finally, a power supply with 3 kW and 5 kVrms~7.5 kVrms is implemented in the laboratory. In addition, an auxiliary winding of step-up transformer is added so that the maximum voltage is limited and the under voltage condition operating can be avoided. The experimental results reveal that the plasma reactor can be controlled at the designated value and the maximum efficiency is 91.34% at 1.8 kW/6.34 kVrms.
Keywords :
digital control; digital signal processing chips; equivalent circuits; power control; resonant invertors; transformers; zero voltage switching; ZVS; atmospheric pressure plasma power supply; auxiliary winding; bridge series resonant inverter; digital constant power control; digital signal processor; equivalent circuit model; phase shift angle control; plasma reactor; power 3 kW; resonant frequency; series resonant network; step up transformer; step-up transformer; zero voltage switching; Intellectual property; Inverters; Laboratories; Manganese; Power measurement;
Conference_Titel :
Future Energy Electronics Conference (IFEEC), 2013 1st International
Conference_Location :
Tainan
Print_ISBN :
978-1-4799-0071-8
DOI :
10.1109/IFEEC.2013.6687526