High-Q 3D tunable RF MEMS filter with a constant fractional bandwidth

Author

Stefanini, Romain ; Chatras, Matthieu ; Pothier, Arnaud ; Guines, Cyril ; Blondy, Pierre

Author_Institution

AIRMEMS, Limoges, France

fYear

2013

fDate

6-8 Oct. 2013

Firstpage

312

Lastpage

315

Abstract

A 2-pole waveguide tunable filter for C-band applications has been designed, fabricated and measured. The frequency shift is realized by integrating Micro Electro-Mechanical Systems (MEMS) switched capacitors in the capacitive area of each resonator. The cavity design and the MEMS shape are optimized to limit losses and get a high unloaded quality factor (Q_u). The inter-resonator coupling (k₁₂) is magnetic and constant over the frequency range leading to a quasi-constant Fractional BandWidth (FBW). Measurements result in a 1.1% FBW resonance frequency shifting from 5.2 to 4.4 GHz. Insertion loss is respectively 1.8-4.2 dB corresponding to a Q_u of 620 at 5.2 GHz and of 250 at 4.4 GHz.

Keywords

Q-factor; micromechanical devices; microwave filters; resonator filters; switched capacitor filters; waveguide filters; 2-pole waveguide filter; C-band applications; FBW; MEMS shape; cavity design; frequency 5.2 GHz to 4.4 GHz; frequency shift; high-Q 3D tunable RF MEMS filter; inter-resonator coupling; loss 1.8 dB to 4.2 dB; microelectromechanical systems switched capacitors; quality factor; quasi-constant fractional bandwidth; Capacitors; Cavity resonators; Micromechanical devices; Microwave filters; Radio frequency; Resonator filters; Switches; Microelectromechanical system (MEMS); RF-MEMS; microwave cavities; tunable resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Integrated Circuits Conference (EuMIC), 2013 European

Conference_Location

Nuremberg

Type

conf

Filename

6687848