Reconfigurable multimodal bandpass filter based on RF-MEMS switchable CPW air-bridges

Author

Contreras, Adrian ; Casals-Terre, Jasmina ; Pradell, Lluis ; Giacomozzi, Flavio ; Iannacci, J. ; Ribo, Miquel

Author_Institution

Signal Theor. & Commun. Dept., Tech. Univ. of Catalonia (UPC), Barcelona, Spain

fYear

2013

fDate

6-8 Oct. 2013

Firstpage

328

Lastpage

331

Abstract

In this paper, a uniplanar RF-MEMS second-order bandpass filter with reconfigurable centre frequency is presented. It is based on quarter-wavelength slotline resonators and CPW-slotline multimodal immittance inverters (MIIs), which are reconfigured using RF-MEMS switchable CPW air-bridges (SABs). The filter can be adequately explained and designed using multimodal theory and circuit models. A surface micromachining process on high-resistivity silicon substrate was used to fabricate the filter. Experimental results show frequency reconfigurability from 12 GHz to 13 GHz, maintaining the same relative bandwidth, and insertion losses of 4.6 dB and 4.7 dB respectively.

Keywords

band-pass filters; coplanar waveguides; invertors; micromachining; micromechanical devices; microwave filters; resonator filters; MII; RF-MEMS switchable CPW air-bridges; SAB; circuit models; frequency 12 GHz to 13 GHz; high-resistivity silicon substrate; loss 4.6 dB; loss 4.7 dB; multimodal immittance inverters; quarter-wavelength slotline resonators; reconfigurable centre frequency; reconfigurable multimodal bandpass filter; surface micromachining process; uniplanar second-order filter; Band-pass filters; Coplanar waveguides; Filtering theory; Integrated circuit modeling; Microwave filters; Resonator filters; Switches; Bandpass filter; RF-MEMS switch; coplanar waveguide (CPW); multimodal circuit; uniplanar circuit;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Integrated Circuits Conference (EuMIC), 2013 European

Conference_Location

Nuremberg

Type

conf

Filename

6687852