• DocumentCode
    656634
  • Title

    Tunable FBARs based on sol-gel grown PMN-PT films

  • Author

    Vorobiev, Alexey ; Gevorgian, S. ; Spreitzer, M. ; Veber, A. ; Suvorov, D.

  • Author_Institution
    Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Gothenburg, Sweden
  • fYear
    2013
  • fDate
    6-8 Oct. 2013
  • Firstpage
    368
  • Lastpage
    371
  • Abstract
    In this work possibilities of using of sol-gel grown PMN-PT films in tunable film bulk acoustic wave resonators are considered. More than 4% tuning of resonance frequency under DC field less than 15 V/μm is demonstrated. Linear and nonlinear electrostriction and induced piezoelectric coefficients of the PMN-PT films are evaluated.
  • Keywords
    acoustic resonators; bulk acoustic wave devices; lead compounds; magnesium compounds; niobium compounds; piezoelectric materials; piezoelectric thin films; DC field; Pb(Mg0.33Nb0.67)O3-PbTiO3; linear electrostriction; nonlinear electrostriction; piezoelectric coefficients; resonance frequency; sol-gel grown PMN-PT films; tunable FBARs; tunable film bulk acoustic wave resonators; Couplings; Crystals; Electrostriction; Film bulk acoustic resonators; Films; Permittivity measurement; Resonant frequency; PMN-PT films; nonlinear electrostriction coefficient; tunable FBAR;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Integrated Circuits Conference (EuMIC), 2013 European
  • Conference_Location
    Nuremberg
  • Type

    conf

  • Filename
    6687862
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=656634