Fabrication of InP-PDs on Silica-Based PLC Using Heterogeneous Integration Technique

Author

Kurata, Yu. ; Nasu, Y. ; Tamura, Masato ; Muramoto, Yoshifumi ; Yokoyama, Haruki ; Itoh, M.

Author_Institution

Nippon Telegraph & Telephone Photonics Labs., NTT Corp., Atsugi, Japan

Volume

32

Issue

16

fYear

2014

fDate

Aug.15, 15 2014

Firstpage

2841

Lastpage

2848

Abstract

The extension of an optical transmission system with a combination of quadrature phase-shift keying and a digital coherent technique has led to the need for economical and compact receivers. In this paper, we demonstrate the heterogeneous integration of InP PDs on a silica-based planar lightwave circuit (PLC). By utilizing adhesive InP chip bonding and tilt dry-etching, we have successfully fabricated high-speed photodiodes (PDs) and a low-loss micro-mirror on a small integration area on the PLC. We have also evaluated the receiver performance. We realized 32 Gbaud DP-QPSK signal demodulation using a compact coherent receiver PLC integrated with eight high-speed PDs, a monitor PD, a polarization beam splitter, two optical 90° hybrids, a variable optical attenuator and micro-mirrors.

Keywords

demodulation; laser beam etching; microfabrication; micromirrors; optical attenuators; optical beam splitters; optical fibre networks; optical receivers; photodiodes; quadrature phase shift keying; Gbaud DP-QPSK signal demodulation; InP-PD fabrication; adhesive InP chip bonding; compact coherent receiver; digital coherent technique; dual-polarization quadrature phase-shift keying; economical receivers; heterogeneous integration technique; high-speed photodiodes; low-loss micromirror; optical transmission system; polarization beam splitter; silica-based PLC; silica-based planar lightwave circuit; tilt dry-etching; variable optical attenuator; Indium phosphide; Mirrors; Optical coupling; Optical device fabrication; Optical polarization; Optical waveguides; Coherent receiver; digital coherent; grass waveguides; heterogeneous integration; mirror; optical 90?? hybrid; optical fiber communication; photodiode (PD); photonic integration circuits;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2014.2315790

Filename

6783788