Title :
Effect of bismuth irradiation on crystalline silicon
Author :
Palade, Catalin ; Slav, Adrian ; Ciurea, Magdalena Lidia ; Lazanu, Sorina
Author_Institution :
Nat. Inst. of Mater. Phys., Magurele, Romania
Abstract :
N-type silicon single crystals with resistivity higher than 8000 Ωcm were irradiated with ions of Bi6+, of 28 MeV kinetic energy. At this energy, the ions are stopped into the wafer. Being much heavier and bigger than the host atoms, they produce major disturbances into the lattice. On the other hand, the produced collision cascade is the source of lattice defects which act as traps. We investigated them using the method of thermally stimulated currents without applied bias. The results are compared with those obtained from the analysis of silicon irradiated with I6+ ions.
Keywords :
bismuth; crystal defects; deformation; electrical resistivity; elemental semiconductors; ion beam effects; ion implantation; semiconductor doping; silicon; thermally stimulated currents; Si:Bi; collision cascade; electron volt energy 28 MeV; ion irradiation; lattice defects; resistivity; thermally stimulated currents; traps; wafer; Bismuth; Charge carrier processes; Electric fields; Ions; Lattices; Radiation effects; Silicon;
Conference_Titel :
Semiconductor Conference (CAS), 2013 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4673-5670-1
Electronic_ISBN :
1545-827X
DOI :
10.1109/SMICND.2013.6688093