Title :
RF-MEMS reconfigurable GaAs MMICs and antennas for microwave/MM-wave applications
Author :
Malmqvist, R. ; Jonsson, R. ; Samuelsson, C. ; Gustafsson, A. ; Reyaz, S. ; Dancila, Dragos ; Rydberg, A. ; Grandchamp, B. ; Seok, Sangok ; Fryziel, M. ; Rolland, P.-A. ; Rantakari, Pekka ; Lahti, M. ; Vaha-Heikkla, T. ; Baggen, R.
Author_Institution :
Swedish Defence Res. Agency (FOI), Linköping, Sweden
Abstract :
This paper presents the results of some reconfigurable RF-MEMS switching circuits and antennas fabricated using GaAs MMIC and LTCC based processes. Wafer-level packaged GaAs RF-MEMS series and shunt switches demonstrating low losses (≤ 0.5 dB) up to 40 GHz are presented together with a compact Ka-band GaAs MEMS 3-bit phase shifter circuit and LTCC based array antenna modules. Furthermore, some GaAs MMIC wideband/V-band RF-MEMS switching networks and a W-band on-chip slot antenna design show promising RF properties for broadband mm-wave applications related to wireless communication and RF-sensing.
Keywords :
III-V semiconductors; MMIC; antenna arrays; gallium arsenide; microwave antennas; millimetre wave antennas; phase shifters; wafer level packaging; GaAs; LTCC based processes; MM wave applications; RF MEMS reconfigurable MMIC; RF MEMS switching circuits; array antenna modules; microwave applications; on chip slot antenna design; phase shifter circuit; reconfigurable antennas; wafer level packaged RF MEMS series switches; wafer level packaged RF MEMS shunt switches; Gallium arsenide; Loss measurement; MMICs; Micromechanical devices; Phase shifters; Radio frequency; Switches;
Conference_Titel :
Semiconductor Conference (CAS), 2013 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4673-5670-1
Electronic_ISBN :
1545-827X
DOI :
10.1109/SMICND.2013.6688097
