220 GHz membrane supported folded slot antenna array

This paper presents the design, electromagnetic modeling, fabrication and characterization of a Folded Slot Antenna Array (FSAA) working at 220 GHz. The structure was processed on a 2.1 μm thick SiO₂/Si₃N₄ dielectric membrane released through deep reactive ion etching (DRIE) of low-resistivity (p = 10 Ω ·cm) silicon. The antenna was characterized on wafer, showing good agreement with simulated results. The measured calibrated gain is 5.5 dB at 220 GHz, and is greater than 0 dB between 200-250 GHz.