Title :
Effect of Al Sn — Doping on properties of zinc oxide nanostructured films grown by magnetron sputtering
Author :
Ghimpu, Lidia ; Tiginyanu, Ion ; Lupan, Oleg ; Mishra, Yogendra Kumar ; Paulowicz, Ingo ; Gedamu, Dawit ; Cojocaru, Ala ; Adelung, R.
Author_Institution :
Lab. of Nanotechnol., Inst. of Electron. Eng. & Ind. Technol., Chisinau, Moldova
Abstract :
Metal doping in nanostructured zinc oxide is important for device applications. To obtain improved performances for practical applications, Aluminum (Al) and Tin (Sn)-doping in zinc oxide nanostructured layers were investigated. Samples were grown by magnetron sputtering and studied by X-ray diffraction (XRD), micro-Raman, scanning electron microscopy (SEM), and energy dispersive X-ray (EDX) techniques. It was observed that nanoparticles are interconnected and form porous network of individual nanoparticles. It is found clear evidence of changes of different properties after doping with aluminum or tin in zinc oxide nanostructured films grown by magnetron sputtering.
Keywords :
II-VI semiconductors; Raman spectra; X-ray chemical analysis; X-ray diffraction; aluminium; nanoparticles; nanoporous materials; porosity; scanning electron microscopy; semiconductor doping; semiconductor growth; semiconductor thin films; sputter deposition; tin; wide band gap semiconductors; zinc compounds; EDX; SEM; X-ray diffraction; XRD; ZnO:Al; ZnO:Sn; doping; energy dispersive X-ray analysis; magnetron sputtering; microRaman spectroscopy; nanoparticles; nanostructured films; porous network; scanning electron microscopy; Doping; Films; Glass; Sputtering; Substrates; Tin; Zinc oxide;
Conference_Titel :
Semiconductor Conference (CAS), 2013 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4673-5670-1
Electronic_ISBN :
1545-827X
DOI :
10.1109/SMICND.2013.6688111
