• DocumentCode
    656900
  • Title

    Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket´s clavate hair

  • Author

    Droogendijk, H. ; de Boer, M.J. ; Sanders, R.G.P. ; Krijnen, G.J.M.

  • Author_Institution
    MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
  • fYear
    2013
  • fDate
    3-6 Nov. 2013
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. First measurements indicate that this MEMS hair-based accelerometer has a resonance frequency of 367 Hz, a detection threshold of 0.63 m/s2 and is able to measure accelerations up to 1 g.
  • Keywords
    acceleration measurement; accelerometers; biomimetics; lithography; micromachining; microsensors; MEMS hair-based accelerometer; SU-8 lithography; acceleration measurement; acceleration sensor; biomimetic accelerometer; clavate hair system; cricket; frequency 367 Hz; surface micromachining; Acceleration; Accelerometers; Frequency measurement; Hair; Micromechanical devices; Noise; Sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2013 IEEE
  • Conference_Location
    Baltimore, MD
  • ISSN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2013.6688165
  • Filename
    6688165
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=656900