High sensitivity CMOS portable biosensor with flexible microfluidic integration

In this work, a portable biosensor that has 60% effective surface area on the chip with 1fg sensitivity by using novel array configuration is designed, and sent for fabrication. High frequency shift, quality factor, capacitance ratio, and small response time during the AC actuation are the critical parameters for the biosensor design. By using a beam structure in contrast to the more common cantilever, the effective surface area increases from 41% to 71%. Flexible microfluidic channels are integrated with the CMOS chip to deliver the biomaterial and are used for the packaging.