Multilayer Giant Magneto-Impedance sensor for low field sensing

Author

Nejad, Saman Nazari ; Fomani, Arash A. ; Mansour, Raafat R.

Author_Institution

Electr. & Comput. Eng. Dept., Univ. of Waterloo, Waterloo, ON, Canada

fYear

2013

fDate

3-6 Nov. 2013

Firstpage

1

Lastpage

4

Abstract

In this paper, several Giant Magneto Impedance (GMI) magnetic sensors have been designed, fabricated, post processed and tested to work in low field intensities (miliTesla range). The sensors are multilayer GMI sensors having CoSiB as GMI material surrounded with two thinner gold layers. The conventional thin film microfabrication process is employed to fabricate the sensors on a glass wafer. A post-processing thermal and magnetic treatment is suggested to magnetize GMI material and enhance performance of the sensors. The suggested post-processing step will decrease fabrication cost of GMI sensors and improve their performance effectively.

Keywords

boron alloys; cobalt alloys; giant magnetoresistance; glass; gold; magnetic multilayers; magnetic sensors; microfabrication; microsensors; silicon alloys; thin film sensors; CoSiB-Au; GMI material; glass wafer; low field sensing; multilayer giant magnetoimpedance magnetic sensor; post-processing magnetic treatment; post-processing thermal treatment; thin film microfabrication process; Amorphous magnetic materials; Impedance; Magnetic fields; Magnetic multilayers; Magnetic sensors; Magnetometers;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2013 IEEE

Conference_Location

Baltimore, MD

ISSN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2013.6688221

Filename

6688221