Title :
CMUT based chem/bio sensors
Author :
Khuri-Yakub, B. Pierre T.
Author_Institution :
E.L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
Abstract :
A ubiquitous, compact, low cost, and high sensitivity and selectivity sensor capable of analyzing chemical analytes in ambient air has potential applications in many areas: healthcare, food quality, liquid mixtures, and many others. More recently, such sensors are being discussed for integration with portable electronic devices like phones, tablets, computers, etc... Integrated in such systems, networks of sensors that communicate via wireless telecommunications can enable the monitoring of various analytes on national and international scales.
Keywords :
biosensors; capacitive sensors; chemical sensors; micromachining; microsensors; portable instruments; ultrasonic transducers; CMUT based chem-bio sensor; capacitive micromachined ultrasonic transducer; chemical analyte analysis; computer; food quality; healthcare; international scale; liquid mixture; national scale; phone; portable electronic device; tablet; wireless telecommunication; Biosensors; Chemicals; Electric potential; Sensitivity; Ultrasonic transducers;
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
DOI :
10.1109/ICSENS.2013.6688296
