The multipole resonance probe: Evolution of a plasma sensor

Author

Schulz, Claudia ; Rolfes, Ilona ; Styrnoll, Tim ; Awakowicz, Peter ; Oberrath, J. ; Mussenbrock, Thomas ; Brinkmann, Ralf Peter ; Storch, R. ; Musch, Thomas

Author_Institution

Inst. of Microwave Syst., Ruhr-Univ. Bochum, Bochum, Germany

fYear

2013

fDate

3-6 Nov. 2013

Firstpage

1

Lastpage

4

Abstract

A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system ”probe-plasma”, a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP´s assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately n_e = 10¹⁶ m^-3... 10¹⁷ m^-3, which is sufficient for the considered process.

Keywords

assembling; plasma devices; plasma diagnostics; sensor fusion; sensors; 3D-electromagnetic field simulation; MRP; argon plasma sensor probe; assembly; multipole resonance probe; wall-mounted sensor; Dielectrics; Frequency measurement; Materials requirements planning; Plasma measurements; Plasmas; Probes; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2013 IEEE

Conference_Location

Baltimore, MD

ISSN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2013.6688324

Filename

6688324