Title :
CNT sensor arrays with P-I-N diodes
Author :
Charisoulis, Thomas ; Jamshidi-Roudbari, Abbas ; Nack-Bong Choi ; Hatalis, Miltos ; Yijiang Lu ; Jing Li
Author_Institution :
Sch. of Electr. & Comput. Eng., Lehigh Univ., Bethlehem, PA, USA
Abstract :
A novel active matrix array approach suitable for a compact multi-channel gas sensor platform is presented. Each sensor site utilizes carbon nanotubes (CNT) on top of a pair of interdigitated electrodes (IDEs) as the gas sensing element. The proposed active matrix sensor array utilizes an array of P-I-N diodes each connected in series with an IDE. The use of P-I-N diodes enables row and column addressing of each sensor thus significantly reducing the required wiring compared to individually addressed sensors. In this work, P-I-N diodes were implemented using either silicon-on insulator (SOI) or Low Temperature Poly-Silicon (LTPS) thin film technology thus validating that both wafer and glass based approaches can be used for the mass manufacture of proposed multi-channel sensor platforms. The functionality of 8×8 and 16×16 sensor arrays is proven with the help of a PEDOT:PSS cover. Data are also presented for the 8×8 arrays and the detection of ammonia (NH3) and chlorine (Cl2) vapor sources is demonstrated.
Keywords :
ammonia; carbon nanotubes; chlorine; elemental semiconductors; gas sensors; nanosensors; p-i-n diodes; sensor arrays; silicon; silicon-on-insulator; C; CNT sensor arrays; Cl; NH3; PEDOT:PSS cover; Si; active matrix array approach; ammonia detection; carbon nanotubes; chlorine vapor sources; compact multichannel gas sensor platform; interdigitated electrodes; low temperature poly-silicon thin film technology; p-i-n diodes; silicon-on insulator; Current measurement; Electrical resistance measurement; Logic gates; Resistance; Resistors; Sensor arrays; Voltage measurement;
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
DOI :
10.1109/ICSENS.2013.6688448