Multiple sensor arrays for single cell metabolic analysis

We present the design, fabrication and characterization of multiple micro-pocket lid arrays used in live single cell metabolic analysis. In previous work we reported a platform for quantifying single cell oxygen consumption rates realized using a fused silica deep wet etching process. Here we extend that work to a dual-depth wet etching process for microfabrication of multiple sensor trapping (MST) lid arrays. Each lid comprises multiple micro-pockets. Oxygen, pH, other extra-cellular sensors, and reference dye were deposited in the pockets. In order to achieve simultaneous monitoring of multiple metabolic parameters, the lid array serves to hermetically seal arrays of microwells, each containing a single cell. The dual-depth etching process we developed can be easily applied to other glass-based microfabrication purposes requiring dual- or multiple-depth microstructures.