Ultra-high scanning speed chemical image sensor based on light addressable potentiometric sensor with analog micro-mirror

Author

Das, Aruneema ; Tsung-Cheng Chen ; Yi-Ting Lin ; Chao-Sung Lai ; Yuan Hui Liao ; Chia-Ming Yang

Author_Institution

Dept. of Electron. Eng., Chang Gung Univ., Taoyuan, Taiwan

fYear

2013

fDate

3-6 Nov. 2013

Firstpage

1

Lastpage

4

Abstract

In chemical image sensor, spatial resolution and scanning speed are the most important factors which may need to optimize and trade off. Before the minimization of spatial resolution, scanning speed of system needs to be improved to have an image in a short time within few seconds. In this study, ultra-high scanning speed of light addressable potentiometric sensor (LAPS) could be achieved by means of the combination of laser diode and single analog micro-mirror in light source. In the constant bias operation, an U-shape of pH solution can be detected within 8.5 sec for 14×121 points in the area of 3.2 mm×6.12 mm by using 5 kHz of ac signal in laser diode. The image resolution of the present LAPS system with 10 μm-thick Si₃N₄/3 nm-thick SiO₂ on 500 μm-thick silicon wafer is 0.0116 mm² which could be further improved by LAPS structure optimization with thinner substrate. A chemical image sensor with ultra-high scanning speed is demonstrated by the application of analog micro-mirror for LAPS.

Keywords

chemical sensors; elemental semiconductors; image resolution; image scanners; image sensors; light sources; micromirrors; microsensors; minimisation; optical sensors; pH measurement; potentiometers; semiconductor lasers; silicon; silicon compounds; AC signal; LAPS; Si₃N₄-SiO₂-Si; U-shape pH solution; frequency 5 kHz; laser diode; light addressable potentiometric sensor; light source; optimization; single analog micromirror; size 10 mum; size 3 nm; size 500 nm; spatial image resolution minimization; time 8.5 s; ultrahigh scanning speed chemical image sensor; Chemicals; Imaging; Laser beams; Micromirrors; Photoconductivity; Sensors; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2013 IEEE

Conference_Location

Baltimore, MD

ISSN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2013.6688484

Filename

6688484