Title :
Trends in small-format infrared array sensors
Author_Institution :
Coll. of Sci. & Eng., Ritsumeikan Univ., Kusatsu, Japan
Abstract :
MEMS-based uncooled infrared sensors are expanding into small-format areas both from high and low ends. This paper reviews the trends in small-format uncooled infrared array sensors, including the reduction of high-performance microbolometers and the development of small-format thermopile array sensors. We also discuss technologies for future growth.
Keywords :
infrared detectors; microsensors; sensor arrays; thermopiles; MEMS-based uncooled infrared sensors; high-performance microbolometers; small-format thermopile array sensors; small-format uncooled infrared array sensors; Infrared sensors; Lenses; Packaging; Sensor arrays; Thermal sensors;
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
DOI :
10.1109/ICSENS.2013.6688495
