DocumentCode
657223
Title
Gas sensing studies of an n-n heterojunction metal oxide semiconductor sensor array based on WO3 and ZnO composites
Author
Naik, Anupriya J. T. ; Parkin, Ivan P. ; Binions, Russell
Author_Institution
Dept. of Chem., Univ. Coll. London, London, UK
fYear
2013
fDate
3-6 Nov. 2013
Firstpage
1
Lastpage
4
Abstract
An array of composite metal oxide semiconductor (MOS) sensors based on WO3 and ZnO, has been fabricated and evaluated against various concentrations of ethanol and NO2 at operating temperatures between 300-500 °C. The composites were prepared by simple manual mechanical mixing and screen printed as porous thick-film gas sensors, and characterized by Scanning Electron Microscopy (SEM) and X-ray Diffraction (XRD). The composites showed a marked enhancement in response under certain conditions, particularly towards 100 ppm ethanol at 350 °C with a 1.5-fold better response compared to pure WO3 and 6.5-fold with respect to pure ZnO and towards 800 ppb NO2 at 300 °C, with a 3.5-fold better response compared to pure WO3 and 7-fold with respect to pure ZnO. The enhanced behavior was thought to be very complex, with influencing factors being the packing structure, junction effects, composition, microstructure and experimental conditions.
Keywords
II-VI semiconductors; MIS devices; X-ray diffraction; composite materials; gas sensors; nitrogen compounds; organic semiconductors; porosity; porous semiconductors; scanning electron microscopy; semiconductor heterojunctions; sensor arrays; thick film sensors; tungsten compounds; wide band gap semiconductors; zinc compounds; NO2; WO3-ZnO; X-ray diffraction; composite material; composition; junction effect; microstructure; n-n heterojunction metal oxide semiconductor sensor array; packing structure; porous thick film gas sensor; scanning electron microscopy; screen printing; simple manual mechanical mixing; temperature 300 degC to 500 degC; temperature 350 degC; Arrays; Ethanol; Gas detectors; Materials; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2013 IEEE
Conference_Location
Baltimore, MD
ISSN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2013.6688509
Filename
6688509
Link To Document