Title :
Temperature effects in chromatic confocal distance sensors
Author :
Berkovic, Garry ; Zilberman, Shlomo ; Shafir, Ehud
Author_Institution :
Opt. Sensing Group, Soreq NRC, Yavne, Israel
Abstract :
We show, both theoretically and experimentally, the effect of changes in temperature on measurements of distance and displacement by a typical commercial chromatic confocal sensor. A temperature change of even 1°C can lead to an error which is larger than the specified absolute accuracy of the sensor. The dominant factor in this effect is the change of the refractive index of the optics with temperature. A correction procedure is described which yields high accuracy (better than 5 μm) over a temperature range from -5 to 55°C.
Keywords :
displacement measurement; distance measurement; optical sensors; refractive index; chromatic confocal distance sensor; displacement measurement; distance measurement; refractive index; temperature -5 degC to 55 degC; temperature effect; Head; Optics; Temperature distribution; Temperature measurement; Temperature sensors;
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
DOI :
10.1109/ICSENS.2013.6688545
