Development of suspended planar two port micro transformer for RF wireless application

Author

I-Yu Huang ; Wen-Hui Huang ; Chian-Hao Sun

Author_Institution

Dept. of Electr. Eng., Nat. Sun Yat-sen Univ., Kaohsiung, Taiwan

fYear

2013

fDate

3-6 Nov. 2013

Firstpage

1

Lastpage

4

Abstract

In order to improve the quality-factor and magnetic coupling factor of micro transformer at high operating frequency, this paper presents two-port micro transformer utilizing micro-electro-mechanical systems (MEMS) technology are featured with very small chip size (0.7 mm×0.7 mm×0.5 mm) and constructed of a 0.32 μm-thick TaN/Ta/Cu bottom electrode, 10 μm-height supporting copper via, and a 6 μm-thick suspended spiral copper conducting layer with 10 μm air gap. Measurement results show the implemented two-port micro transformer demonstrates very high magnetic coupling factor (0.78) and quality-factor (17.2) at 5.2 GHz operating frequency.

Keywords

Q-factor; copper; electromagnetic coupling; elemental semiconductors; microelectrodes; microfabrication; micromechanical devices; microwave devices; silicon; tantalum; tantalum compounds; transformers; two-port networks; MEMS technology; RF wireless application; Si; TaN-Ta-Cu; bottom electrode; frequency 5.2 GHz; magnetic coupling factor; microelectromechanical system technology; quality-factor; size 0.32 mum; size 10 mum; size 6 mum; suspended planar two port microtransformer; suspended spiral copper conducting layer; Copper; Couplings; Micromechanical devices; Power transformer insulation; Radio frequency; Substrates; Windings;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2013 IEEE

Conference_Location

Baltimore, MD

ISSN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2013.6688559

Filename

6688559