DocumentCode
657283
Title
Acoustic and electrical properties of Ca3 Ta G a 3 Si2 O14 piezoelectric resonators at elevated temperatures
Author
Johnson, Ward L. ; Schulz, Markus ; Fritze, H.
Author_Institution
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
fYear
2013
fDate
3-6 Nov. 2013
Firstpage
1
Lastpage
4
Abstract
Synthetic piezoelectric crystals in the P321 crystal class have been a focus of substantial research in relation to their application in high-temperature resonant bulk-acoustic-wave (BAW) and surface-acoustic-wave (SAW) sensors. Most of this research has been on partially disordered langasite (LGS) and langatate (LGT), but fully ordered crystals in this class, such as Ca3TaGa3Si2O14 (CTGS), have been suggested as offering potentially superior performance. In this study, acoustic characteristics and electrical conductivity of CTGS bulk acoustic resonators with a crystal orientation of (YXl) -30° are investigated at the fundamental mode of 5 MHz and overtones of 15 MHz and 25 MHz in the temperature range from room temperature to 1100 °C. Magnitudes of the fractional changes in frequency with temperature are found to be less than 41 × 10-6 K-1 over this range, with turnover temperatures near 200 °C for the third and fifth overtones. The acoustic loss μ-1 at ambient temperatures is greater than the lowest values previously reported for LGS and LGT. Between 100 °C and 700 °C, μ-1 has two anelastic relaxation peaks that are similar to those previously reported for LGS and LGT. The electrical conductivity over the range from 500 °C to 1100 °C is found to be approximately an order of magnitude lower than that previously reported for LGS, and this leads to a reduction in μ-1 at elevated temperatures.
Keywords
anelastic relaxation; bulk acoustic wave devices; calcium compounds; crystal orientation; electrical conductivity; gallium compounds; high-temperature techniques; losses; surface acoustic wave resonators; tantalum compounds; temperature sensors; CTGS; Ca3TaGa3Si2O14; LGS; LGT; P321 crystal class; acoustic characteristics; acoustic loss; ambient temperature; anelastic relaxation peak; bulk acoustic resonator; bulk acoustic wave; crystal orientation; electrical conductivity; elevated temperature; frequency 15 MHz; frequency 25 MHz; frequency 5 MHz; fully ordered crystal; high temperature resonant BAW sensor; high temperature resonant SAW sensor; langasite; langatate; piezoelectric resonator; surface acoustic wave; synthetic piezoelectric crystal; temperature 20 degC to 1100 degC; Acoustic measurements; Conductivity; Crystals; NIST; Resonant frequency; Temperature distribution; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2013 IEEE
Conference_Location
Baltimore, MD
ISSN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2013.6688573
Filename
6688573
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