Finite element modelling of piezoelectric micro-cantilever as Gas sensor

This paper presents the modelling and design of piezoelectric based micro-cantilever for operation in enclosed environmental conditions. The successful design of cantilever is based on the interdependence of various mechanical and electrical parameters and further their dependence on the selected material and chosen geometry. Thus the end result depends on the mechanical and electrical sensitivities of the cantilever. The cantilever design is based on the material selection as well as determination of geometrical dimensions. In this proposed design, an aluminium material is selected for cantilever design on the silicon substrate. Systematic steps toward optimization of geometrical dimensions include initial analytical estimates of geometrical dimensions, followed by finite-element modelling and analysis of such cantilevers under the applied electric field. The observed design have shown variation in free end of micro-cantilever beam for different gases. Thus, this proposed cantilever can be a fine gas sensor.