Laser-fabrication of neural electrode arrays with sputtered iridium oxide film

Iridium oxide is known for its superior charge injection capacity, required for high-performance implantable stimulation electrodes. We integrated sputtered iridium oxide films into an electrode fabrication process based on laser-micromachining, suitable for production of neural electrodes for human use. In comparison to traditional electrode material MP35N (recording) and PtIr (stimulation), our iridium oxide electrodes provide a lower noise floor in recording settings and a much larger injectable charge in stimulation settings.