Design of a novel tremor suppression device using a linear delta manipulator for micromanipulation

In this paper, the design of a high precision device using a Linear Delta manipulator was proposed to compensate for the tremor signal in three translational directions. A Linear Delta manipulator is a suitable tremor suppression device due to the simple structure and high stiffness with the vertical direction in the application of micro manipulation such as microsurgery and cell manipulation. In order to implement the mechanism of the Linear Delta manipulator to the device, three voice coil motors and three linear encoders with high resolution were used. The flexure mechanism was applied to the device to avoid the friction effect of the small ball joint. Finally, the experiments for the validation of the proposed device were performed as follows: (1) position control in each axis for accuracy, and (2) sine wave tracking (500 μm, 12Hz) for bandwidth of the system.