Silicon radio-frequency planar nanofluidic channels

Ten-nanometer deep planar nanofluidic channels are designed, fabricated and characterized. Silicon microstrip lines are incorporated with the nanofluidic channels to provide broadband radio frequency (RF) measurement capabilities so that materials in the channels can be investigated in a label-free and non-invasive manner. Deionized water in the 10 nm channels is tested to demonstrate the operation of the devices. The techniques are promising to address the electrical sensing and signal transduction issues in current nanochannel efforts. Further work on reliable and repeatable probe contacts and silicon transmission line dispersion properties is needed for quantitative analysis of materials in the channels.