A 330–500GHz micro-machined directional coupler

Author

Do, James T. ; Qiang Yu ; Hesler, J.L. ; Barker, N.S.

Author_Institution

Charles L. Brown Dept. of Electr. & Comput. Eng., Univ. of Virginia, Charlottesville, VA, USA

fYear

2013

fDate

2-7 June 2013

Firstpage

1

Lastpage

3

Abstract

A 330-500GHz (WR2.2) directional coupler is demonstrated. The coupling is achieved by parallel quarter-wavelength gold beams suspended in air over a silicon substrate. The circuit was designed in an “H” shape in order to transition to low loss rectangular waveguide. We present the design and analysis of a WR2.2 coupler with 4dB insertion loss, 10dB coupling factor and 20dB minimum isolation. The techniques we describe can be employed to design high performance, low cost THz components.

Keywords

gold; millimetre wave directional couplers; rectangular waveguides; submillimetre wave couplers; Au; H shape; WR2.2 coupler; WR2.2 directional coupler; frequency 330 GHz to 500 GHz; gold beams; micromachined directional coupler; parallel quarter-wavelength; rectangular waveguide; silicon substrate; Aluminum; Couplers; Couplings; Gold; Insertion loss; Silicon; Substrates; couplers; coupling circuits; millimeter wave circuits; passive circuits; silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (IMS), 2013 IEEE MTT-S International

Conference_Location

Seattle, WA

ISSN

0149-645X

Print_ISBN

978-1-4673-6177-4

Type

conf

DOI

10.1109/MWSYM.2013.6697408

Filename

6697408