Title :
Graphene etching by a Near-Field Scanning Microwave Microscope
Author :
Monti, Tamara ; Di Donato, A. ; Mencarelli, Davide ; Venanzoni, G. ; Morini, A. ; Vlassiouk, Ivan V. ; Tselev, A. ; Farina, Marcello
Author_Institution :
Inf. Eng. Dept. (DII), Univ. Politec. delle Marche, Ancona, Italy
Abstract :
Significant efforts are being invested in investigation of graphene, as well as its nanopatterning and shaping, owing to its promising properties. Here we present a study of hexagonal graphene flakes, deposited on a copper foil by chemical vapor deposition. In particular we have exploited a Near-Field Scanning Microwave Microscope, and investigated the impact of the microwave power on the sample. From preliminary data, we found the possibility of inducing a localized destruction of the graphene by means of the near-field microwave probe. We exploited this effect to create a recognizable pattern on a flake. A discussion of the roles of concurrent physical phenomena is also presented.
Keywords :
chemical vapour deposition; etching; graphene; nanopatterning; C; chemical vapor deposition; copper foil; etching; hexagonal graphene flakes; nanopatterning; near-field scanning microwave microscopy; Etching; Microwave Imaging; Nanolithography; Nanoscale Devices; Nanostructured Materials; Scanning Probe Microscopy;
Conference_Titel :
Microwave Symposium Digest (IMS), 2013 IEEE MTT-S International
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4673-6177-4
DOI :
10.1109/MWSYM.2013.6697641