Title :
Impact of chemical mechanical polishing on the quality factor of Ba0.5Sr0.5TiO3 solidly mounted resonator
Author :
Saddik, George N. ; York, R.A.
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. of California Santa Barbara, Santa Barbara, CA, USA
Abstract :
A voltage activated barium strontium titanate solidly mounted resonator was fabricated and measured. The barium strontium titanate was deposited on a chemical mechanical polished acoustic Bragg reflector with a surface roughness of 0.504nm RMS. Data was collected on the device at a dc bias voltage range of 0V to 25V in 5V increments. The barium strontium titanate solidly mounted resonator showed an effective quality factor of 100 to 180 over the bias range.
Keywords :
barium compounds; bulk acoustic wave devices; chemical mechanical polishing; strontium compounds; surface roughness; titanium compounds; Ba0.5Sr0.5TiO3; RMS; acoustic Bragg reflector; bulk acoustic wave device; chemical mechanical polishing; dc bias voltage; quality factor; surface roughness; voltage 0 V to 25 V; voltage activated barium strontium titanate solidly mounted resonator; Acoustics; Chemicals; Q-factor; Rough surfaces; Surface impedance; Surface roughness; Surface treatment; Acoustic devices; barium compounds; bulk acoustic wave devices; ferroelectric films; piezoelectric devices; voltage control;
Conference_Titel :
Microwave Symposium Digest (IMS), 2013 IEEE MTT-S International
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4673-6177-4
DOI :
10.1109/MWSYM.2013.6697726
