Sensor structures generated with combination of SU8 and PCBMEMS

The usage of standard PCBs (Printed Circuit Boards) for the creation of microfluidic systems was already reported. Here the combination of a standard microtechnology using photolithography and photo sensitive layers (SU8) and the PCB MEMS technology is presented. Using PCBs as the substrate the integration of electronics is simple and the substrate is available at low cost. Putting the sophisticated SU8 based micro technology using photolithography on top, new systems can be created. This combination leads to interesting low cost solutions for micro systems. Both technologies deliver their best, in the PCB technology integrated electrodes and electronics can be created while the SU8 technology adds high resolution high aspect-ratio micro systems which are not possible in a PCB implementation. Using this technology combination several sensor structures can be created. In this paper as successful examples an electrochemical sensor cell array and a flow sensor will be presented.