Title :
Long-term stability of a hermetically packaged MEMS disk oscillator
Author :
Rocheleau, Tristan O. ; Thura Lin Naing ; Nguyen, Clark T.-C
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
A low phase noise oscillator referenced to a wineglass disk MEMS resonator, hermetically vacuum packaged in a purpose-built packaging system, and measured in a double-oven, has provided a first long-term measurement of a MEMS disk oscillator over 10 months. After an initial burn-in period, the frequency can be seen to stabilize to within the short-term measurement variation of 300 ppb over a period of months, a significant improvement from previous studies on other MEMS resonator types, where frequency fluctuations were between 3.1 ppm and 1.2 ppm over similar time scales. Including burn-in, the total observed aging of 10 ppm is now on par with many consumer-grade quartz oscillators designed for timing applications and sufficient for target wireless sensor network applications.
Keywords :
crystal oscillators; electronics packaging; frequency measurement; glass; micromechanical devices; phase noise; stability; consumer-grade quartz oscillator; frequency measurement; hermetical vacuum packaging; hermetically packaged MEMS disk oscillator; initial burn-in period; long-term stability; low phase noise oscillator; purpose-built packaging system; short-term measurement variation stability; target wireless sensor network application; timing application; wine-glass disk MEMS resonator; Micromechanical devices; Oscillators; Resonant frequency; Stability criteria; Temperature measurement; Time-frequency analysis; MEMS oscillator; aging; hermetic packaging; long-term stability;
Conference_Titel :
European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 Joint
Conference_Location :
Prague
DOI :
10.1109/EFTF-IFC.2013.6702095
