Mechanically coupled SOI Lamé-mode resonator-arrays: Synchronized oscillations with high quality factors of 1 million

In this work, we present the first demonstration of synchronized oscillations in an SOI resonator array with quality factors (Qs) in the order of 10⁶ through mechanical coupling. We have fabricated arrays of up to six resonators. Our experimental results indicate that even as the length of the array is expanded, Q is maintained in the order of 10⁶ at a resonant frequency of 13MHz. This yields an f·Q product of 1.3×10¹³, which is close to that of a single Lamé mode resonator. With Q maintained at 10⁶, our results show that the motional resistance reduces according to the number of resonators incorporated into the array. These results in turn suggest that mechanical coupling can be extended to even yet longer arrays for reducing motional resistance as well as improve power handling without notably diminishing Q.