Experimental and theoretical results on SC-cut quartz resonators collectively realized on 4” wafers

In order to produce collective SC-cut quartz resonators on 4" wafers, we use a Finite Element Analysis software to model and simulate new resonator design. The modeling allowed us to optimize the geometrical and the physical parameters of the prototypes. These resonators are encapsulated under vacuum to not damage their performances. Knowing that a structure with radius of curvature is hardly compatible with collective fabrication, we have realized plano-plano structure working at 14 MHz.