A miniature timing microsystem using two silicon resonators

Author

Ruffieux, David ; Baborowski, J. ; Scolari, N. ; Le, T.C. ; Jaakkola, Anttoni ; Pensala, Tuomas ; Dekker, James ; Manier, C.A. ; Zoschke, K. ; Oppermann, H.

Author_Institution

CSEM, Neuchatel, Switzerland

fYear

2013

fDate

21-25 July 2013

Firstpage

750

Lastpage

753

Abstract

This paper presents a miniature timing microsystem based on a pair of co-integrated low and high frequency silicon resonators -430kHz or 522kHz and 26MHz respectively-so as to implement a μW-level accurate, low power, temperature-compensated real time clock (RTC) and to generate low noise, low jitter clocks at any frequency between 1-50MHz in a reconfigurable way at less than 10mW power dissipation.

Keywords

compensation; elemental semiconductors; micromechanical resonators; silicon; timing jitter; μW-level accurate; MEMS resonator; RTC; Si; frequency -430 kHz; frequency 1 MHz to 50 MHz; frequency 522 kHz; low jitter clock; low noise generation; miniature timing microsystem; power dissipation; temperature-compensated real time clock; Clocks; Oscillators; Resonant frequency; Silicon; Temperature measurement; Temperature sensors; Timing; 3-D integration; CMOS; RTC; Silicon resonators; TCMO; TSV; hybrid integration; programmable clocks; timing;

fLanguage

English

Publisher

ieee

Conference_Titel

European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 Joint

Conference_Location

Prague

Type

conf

DOI

10.1109/EFTF-IFC.2013.6702234

Filename

6702234