A SH-APM liquid viscosity sensor based on PZT-5H

Author

Zhijun Chen ; Mengyang Wang ; Peng Ruan ; Xin Huang ; Jingyong Liu

Author_Institution

Coll. of Autom. Eng., Nanjing Univ. of Aeronaut. & Astronaut., Nanjing, China

fYear

2013

fDate

21-25 July 2013

Firstpage

791

Lastpage

794

Abstract

Viscosity is one of the characteristic parameters of liquid. The measurement of liquid viscosity is required in many applications. Compared with other acoustic wave device, the shear-horizontal acoustic plate mode wave (SH-APM) device is suitable for liquid sensing. In this paper, the theoretical model of SH-APM device loaded with viscous liquid is built using the propagation characteristics of acoustic wave in laminated mediums, the liquid viscosity is introduced by adding the imaginary part in liquid elastic tensor, and the condition of exciting SH-APM in the piezoelectric plate by inter-digital transducers is researched. Choosing PZT-5H piezoelectric ceramic as substrate material, the numerical calculation is implemented and the SH-APM device is fabricated accordingly. Using different ratios of pure water and glycerol as liquid samples, the validity of liquid viscosity sensing by SH-APM is proved by the experimental results.

Keywords

acoustic transducers; lead compounds; organic compounds; viscosity measurement; water; PZT; PZT-5H piezoelectric ceramic; glycerol; inter-digital transducers; laminated mediums; liquid elastic tensor; liquid viscosity measurement; liquid viscosity sensor; piezoelectric plate; propagation characteristics; pure water; shear-horizontal acoustic plate mode wave device; substrate material; Acoustic waves; Attenuation; Boundary conditions; Liquids; Sensors; Substrates; Viscosity; PZT-5H; liquid viscosity; propagation attenuation; propagation velocity; shear horizontal acoustic plate mode wave;

fLanguage

English

Publisher

ieee

Conference_Titel

European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 Joint

Conference_Location

Prague

Type

conf

DOI

10.1109/EFTF-IFC.2013.6702250

Filename

6702250