Title :
A SH-APM liquid viscosity sensor based on PZT-5H
Author :
Zhijun Chen ; Mengyang Wang ; Peng Ruan ; Xin Huang ; Jingyong Liu
Author_Institution :
Coll. of Autom. Eng., Nanjing Univ. of Aeronaut. & Astronaut., Nanjing, China
Abstract :
Viscosity is one of the characteristic parameters of liquid. The measurement of liquid viscosity is required in many applications. Compared with other acoustic wave device, the shear-horizontal acoustic plate mode wave (SH-APM) device is suitable for liquid sensing. In this paper, the theoretical model of SH-APM device loaded with viscous liquid is built using the propagation characteristics of acoustic wave in laminated mediums, the liquid viscosity is introduced by adding the imaginary part in liquid elastic tensor, and the condition of exciting SH-APM in the piezoelectric plate by inter-digital transducers is researched. Choosing PZT-5H piezoelectric ceramic as substrate material, the numerical calculation is implemented and the SH-APM device is fabricated accordingly. Using different ratios of pure water and glycerol as liquid samples, the validity of liquid viscosity sensing by SH-APM is proved by the experimental results.
Keywords :
acoustic transducers; lead compounds; organic compounds; viscosity measurement; water; PZT; PZT-5H piezoelectric ceramic; glycerol; inter-digital transducers; laminated mediums; liquid elastic tensor; liquid viscosity measurement; liquid viscosity sensor; piezoelectric plate; propagation characteristics; pure water; shear-horizontal acoustic plate mode wave device; substrate material; Acoustic waves; Attenuation; Boundary conditions; Liquids; Sensors; Substrates; Viscosity; PZT-5H; liquid viscosity; propagation attenuation; propagation velocity; shear horizontal acoustic plate mode wave;
Conference_Titel :
European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 Joint
Conference_Location :
Prague
DOI :
10.1109/EFTF-IFC.2013.6702250
