Nonlinear dynamics in aluminum nitride contour-mode resonators

Author

Miller, Nate ; Piazza, Gianluca

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2013

fDate

21-25 July 2013

Firstpage

9

Lastpage

12

Abstract

In this work we discuss the self-heating dynamics of aluminum nitride contour mode resonators. The self-heating introduces a quadratic coupling between the resonator motion and its temperature. This coupling produces a nonlinear frequency response identical to the Duffing resonator in steady-state. However, since the thermal relaxation rate is much smaller than the mechanical relaxation rate the dynamics of the resonator differ from the conventional Duffing resonator.

Keywords

III-V semiconductors; aluminium compounds; crystal resonators; wide band gap semiconductors; AlN; aluminum nitride contour-mode resonators; mechanical relaxation rate; nonlinear dynamics; nonlinear frequency response; quadratic coupling; resonator motion; resonator temperature; self-heating dynamics; thermal relaxation rate; Admittance; Aluminum nitride; Equations; III-V semiconductor materials; Integrated circuit modeling; Mathematical model; Resonant frequency; Aluminum nitride contour-mode resonator; MEMS; nonlinear; self-heating;

fLanguage

English

Publisher

ieee

Conference_Titel

European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 Joint

Conference_Location

Prague

Type

conf

DOI

10.1109/EFTF-IFC.2013.6702255

Filename

6702255