Frequency scaling of molybdenum disulfide (MoS2) two-dimensional (2D) nanomechanical resonators

Molybdenum disulfide (MoS₂) is a layered material that has attractive potential for enabling ultrascaled two-dimensional (2D) nanostructures and nanosystems for future electronics, optoelectronics, and sensors applications. It also has superb mechanical properties, being ~30 times stronger than steel and has intrinsic strain limit up to ~10-20%. These make MoS₂ a particularly interesting material for building novel 2D nanoelectromechanical systems (NEMS). Here we demonstrate ultrathin 2D NEMS resonators based on drumhead-structured MoS₂ diaphragms suspended on circular microtrenches, vibrating at high and very high frequencies (HF & VHF). We show that the resonance frequency can be tuned by adjusting parameters such as built-in tension and dimensions of the MoS₂ devices. In combination with analytical and computational modeling, we identify in these devices the elastic transition regime between the membrane and plate limits, which leads to a clear roadmap for frequency scaling of MoS₂ NEMS resonators.