DocumentCode
66919
Title
Significantly Enhanced Inductance and Quality Factor of GHz Integrated Magnetic Solenoid Inductors With FeGaB/ 
Multilayer Films
Author
Yuan Gao ; Zardareh, Saba Zare ; Xi Yang ; Tian Xiang Nan ; Zi Yao Zhou ; Onabajo, Marvin ; Ming Liu ; Aronow, Andrew ; Mahalingam, Krishnamurthy ; Howe, Brandon M. ; Brown, Gail J. ; Sun, Nian X.
Author_Institution
Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA, USA
Volume
61
Issue
5
fYear
2014
fDate
May-14
Firstpage
1470
Lastpage
1476
Abstract
We report new high quality factor (Q) integrated GHz magnetic inductors based on solenoid structures with FeGaB/Al2O3 multilayer films, which show significantly enhanced inductance and quality factor at GHz frequencies over their air core counterparts. These inductors show an excellent high-frequency performance with a wide operation frequency range 0.5-2.5 GHz, in which the inductance is flat and the peak quality factor can reach ~20. The inductance of the magnetic inductor shows >100% enhancement compared with that of the same size air core inductor. These novel GHz inductors with high inductance and Q enhancement show great promise for applications in radio frequency integrated circuits.
Keywords
Q-factor; inductance; inductors; radiofrequency integrated circuits; solenoids; FeGaB-Al2O3; GHz integrated magnetic solenoid inductors; air core inductor; inductance; multilayer films; quality factor; radio frequency integrated circuits; Inductance; Inductors; Magnetic anisotropy; Magnetic cores; Magnetic multilayers; Q-factor; Radio frequency; FeGaB; high Q; integrated magnetic inductor; multilayer film; radio frequency (RF) application; solenoid; solenoid.;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2014.2313095
Filename
6784044
Link To Document