Characteristic analysis and improvement of VCM/PZT Driven XY nanostage for atomic force microscope

In scanning-sample type Atomic Force Microscope, XY nanostage is needed for scanning. Performance of AFM is determined by the XY nanostage. In this paper, two types of xy nanostage are introduced: VCM and PZT type nanostage. We discussed characteristics, problems and solutions of VCM/PZT nanostage. The performance of the solution is evaluated by AFM imaging. VCM nanostage has good linearity, wide working range with vibration problem. PZT nanostage has high bandwidth, good vibration performance with small working range. This paper will be tip for selection of nano stage to AFM user/engineer. We recommend VCM nanostage for wide working range sample and several nanometer sample imaging and PZT stage for sub nanometer sample imaging or poor vibration environment.