DocumentCode
67007
Title
Forecast of CMOS Imagers Yield Learning by the Gompertz Model
Author
Organtini, Paolo ; Russo, Felice
Author_Institution
Micron Technol., Avezzano, Italy
Volume
26
Issue
3
fYear
2013
fDate
Aug. 2013
Firstpage
393
Lastpage
399
Abstract
This paper presents a novel approach to modeling yield using the Gompertz function, which is widely used in biology to model the growth processes of plants, tumors, etc. We demonstrate that the yield-learning process in a semiconductor fab follows the same behavior of the growth of biological systems. We start with a simple time series model, which describes the learning process in terms of defect density reduction. Then we obtain the Gompertz growth model, which also fits the experimental data better than more traditional learning models such as the Gruber´ s general yield learning model [38] .
Keywords
CMOS image sensors; integrated circuit manufacture; CMOS imagers yield learning; Gompertz function; Gompertz growth model; Gompertz model; biological systems growth; biology; defect density reduction; semiconductor fab; time series model; yield learning model; CMOS integrated circuits; forecasting; imaging; modelling; yield estimation;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2263887
Filename
6517287
Link To Document